Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer
نویسندگان
چکیده
منابع مشابه
Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage
High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relativ...
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Article history: Received 29 June 2013 Revised 23 February 2014 Accepted 28 February 2014 Available online xxxx
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ژورنال
عنوان ژورنال: Advances in Materials Science and Engineering
سال: 2019
ISSN: 1687-8434,1687-8442
DOI: 10.1155/2019/3025871